Diamond Films and Coatings

435 Pages·1993·31.121 MB·English

by  Davis, R.F.(eds.)

DIAMOND FILMS
AND COATINGS
Development, Properties, and
Applications
detidE yb
Robert F. Davis
htroN aniloraC etatS ytisrevinU
tnemtrapeD fo slairetaM ecneicS dna gnireenignE
,hgielaR htroN aniloraC
NOYES PUBLICATIONS
Park Ridge, New Jersey, U.S.A.
thgirypoC Q 1993 yb seyoN snoitacilbuP
oN trap fo siht koob yam eb decudorper ro dezilitu ni
yna mrof ro yb yna ,snaem cinortcele ro ,lacinahcem
gnidulcni ,gniypocotohp gnidrocer ro yb yna -amrofni
noit egarots dna laveirter ,metsys tuohtiw noissimrep
ni gnitirw morf eht .rehsilbuP
yrarbiL fo ssergnoC golataC draC :rebmuN 92-35011
:NBSI O-8155-1323-2
detnirP ni eht detinU setatS
dehsilbuP ni eht detinU setatS fo aciremA yb
seyoN snoitacilbuP
lliM ,daoR Park ,egdiR weN yesreJ 07656
1098765432
yrarbiL fo ssergnoC noitacilbuP-ni-gnigolataC Data
dnomaiD smlif dna sgnitaoc : ,tnempoleved ,seitreporp dna snoitacilppa
I detide yb treboR .F .sivaD
.p .mc
sedulcnI lacihpargoilbib secnerefer dna .xedni
NBSI O-8155-1323-2
1. ,sdnomaiD .laicifitrA 2. dnomaiD niht .smlif .I ,sivaD
treboR .F treboR( ,)retsoF 1942- .
TP8735D5D52 1992
)ucd--88.’666 92-35011
PIC
Editors
natnioR .F ,hahsnuB ytisrevinU of ,ainrofilaC soL selegnA (Series Editor)
Gaty E. ,eriuGcM scinortceleorciM retneC of htroN aniloraC (Series Editor)
nehpetS .M ,leganssoR MBI samohT .J nostaW hcraeseR retneC
(Consulting Editor)
cinortcelE Materials and Process Technology
NOITISOPED TECHNOLOGIES FOR SMLIF DNA COATINGS: yb Rointan F. hahsnuB te
al
LACIMEHC ROPAV NOITISOPED FOR :SCINORTCELEORCIM yb Arthur Sherman
ROTCUDNOCIMES SLAIRETAM DNA SSECORP TECHNOLOGY :KOOBDNAH edited yb
yraG .E McGuire
DIRBYH TIUCRICORCIM TECHNOLOGY :KOOBDNAH yb James J. Licari dna dranoeL R.
Enlow
HANDBOOK OF THIN MLIF NOITISOPED SESSECORP DNA :SEUQINHCET edited yb
Klaus .K fargeuhcS
RETSULC-DEZINOI MAEB NOITISOPED DNA :YXATIPE yb Toshinori Takagi
NOISUFFID ANEMONEHP NI THIN SMLIF DNA CINORTCELEORCIM :SLAIRETAM edited
yb ardneveD Gupta dna luaP .S oH
HANDBOOK OF NOITANIMATNOC CONTROL NI :SCINORTCELEORCIM edited yb Donald
L Tolliver
HANDBOOK OF NOI MAEB GNISSECORP TECHNOLOGY: edited yb Jerome J. Cuomo,
nehpetS .M Rossnagel, dna Harold R. namfuaK
CHAFtACTERlZATlON OF ROTCUDNOCIMES emuloV-SLAIRETAM :1 edited yb yraG .E
McGuire
HANDBOOK OF AMSALP GNISSECORP TECHNOLOGY: edited yb nehpetS .M Rossnagel,
Jerome J. Cuomo, dna Wrlliam D. Westwood
HANDBOOK OF ROTCUDNOCIMES NOCILIS TECHNOLOGY: edited yb William C. ,araM’O
treboR .B Herring, dna eeL .P tnuH
HANDBOOK OF REMYLOP COATINGS FOR dnoceS-SCINORTCELE Edition: yb James
J. Licari dna aruaL .A Hughes
HANDBOOK OF SPUTTER NOITISOPED TECHNOLOGY: yb akatoyiK Wasa dna Shigeru
awakayaH
HANDBOOK OF ISLV :YHPARGOHTILORCIM edited yb William .B Glendinning dna John
N. Helbert
YRTSIMEHC OF SUPERCONDUCTOR :SLAIRETAM edited yb Terre11 .A harednaV
LACIMEHC ROPAV NOITISOPED OF TUNGSTEN DNA TUNGSTEN :SEDICUIS yb John
E.J. Schmitz
YRTSIMEHCORTCELE OF SROTCUDNOCIMES DNA :SCINORTCELE edited yb John
ydraHcM dna knarF Ludwig
(continued)
V
vi Series
HANDBOOK OF LACIMEHC ROPAV :NOITISOPED yb hguH .0 Pierson
DNOMAID SMLIF DNA COATINGS: edited yb treboR F. sivaD
ELECTRODEPOSITION: yb Jack W. Dini
Ceramic and Other Materials-Processing and Technology
SOL-GEL TECHNOLOGY FOR THIN ,SMLIF ,SREBIF ,SMROFERP SCINORTCELE DNA
YTLAICEPS :SEPAHS edited yb Lisa C. Klein
REBIF DECROFNIER CIMAREC :SETISOPMOC yb .S.K Mazdiiasni
DECNAVDA CIMAREC GNISSECORP DNA TECHNOLOGY-Volume :1 edited yb Jon .P.G
Binner
FRICTION DNA WEAR TRANSITIONS OF :SLAIRETAM yb reteP J. ualB
KCOHS WAVES FOR LAIRTSUDNI :SNOITACUPPA edited yb Lawrence .E rruM
LAICEPS GNITLEM DNA GNISSECORP TECHNOLOGIES: edited yb .K.G tahB
CORROSION OF ,SSALG SCIMAREC DNA CIMAREC SUPERCONDUCTORS: edited yb
divaD .E Clark dna Bruce .K Zoitos
HANDBOOK OF LAIRTSUDNI SEIROTCARFER TECHNOLOGY: yb nehpetS C. Carniglia
dna Gordon L anraB
CIMAREC SMLIF DNA COATINGS: ediied yb John .B Wachtman dna Richard .A Haber
Relsted Ties
SEVISEHDA TECHNOLOGY :KOOBDNAH yb Arthur H. kcordnaL
HANDBOOK OF THERMOSET :SCITSALP edited yb yendiS H. Goodman
ECAFRUS NOITARAPERP SEUQINHCET FOR EVISEHDA :GNIDNOB yb dnomyaR F.
Wegman
GNITALUMROF SCITSALP DNA SREMOTSALE YB COMPUTER: yb Ralph D. Hermansen
HANDBOOK OF EVISEHDA DEDNOB STRUCTURAL :RIAPER yb dnomyaR F. Wegman
dna Thomas R. Tulles
CARBON-CARBON SLAIRETAM DNA :SETISOPMOC edited yb John D. yelkcuB dna naD
D. eidE
Contributors
James E. Butler Roland Haubner
ecafruS/saG scimanyD noitceS ehcsinhceT tatisrevinU
lavaN hcraeseR yrotarobaL etutitsnI ruf ehcsimehC
,notgnihsaW DC eigolonhceT rehcsinagrona
Stoffe
Frances G. Celii ,anneiV airtsuA
saxeT ,stnemurtsnI .cnI
,sallaD XT Richard J. Koba
amsalP ,mrehT .cnI
Kalyan Kumar Das St. ,grubsreteP LF
eboK leetS hcraeseR
seirotarobaL Hua-Shuang Kong
cinortcelE slairetaM retneC eerC ,hcraeseR .cnI
hcraeseR elgnairT ,kraP NC ,mahruD NC
Robert F. Davis Benno Lux
htroN aniloraC etatS ytisrevinU ehcsinhceT tatisrevinU
tnemtrapeD of slairetaM ecneicS etutitsnI ruf ehcsimehC
dna gnireenignE eigolonhceT rehcsinagrona
,hgielaR NC Stoffe
,anneiV airtsuA
Jeffrey T. Glass
htroN aniloraC etatS ytisrevinU Kurt Nassau
tnemtrapeD of slairetaM ecneicS A451 aeniuG wolloH daoR
dna gnireenignE ,nonabeL NJ
,hgielaR NC
ix
x srotubirtnoC
rheP E. nossrheP Max N. Yoder
ecafruS/saG scimanyD noitceS scinortcelE margorP
lavaN hcraeseR yrotarobaL Office of lavaN hcraeseR
,notgnihsaW DC ,notgnilrA VA
leahciM oenniP Wei Zhu
eboK leetS hcraeseR htroN aniloraC etatS ytisrevinU
seirotarobaL tnemtrapeD of slairetaM ecneicS
cinortcelE slairetaM retneC dna gnireenignE
hcraeseR elgnairT ,kraP NC ,hgielaR NC
Linda S. Plano
eboK leetS hcraeseR
seirotarobaL
cinortcelE slairetaM retneC
hcraeseR elgnairT ,kraP NC
Notice
oT eht tseb of eht s’rehsilbuP egdelwonk eht noitamrofni
deniatnoc ni siht noitacilbup si ;etarucca ,revewoh eht
rehsilbuP semussa on ytilibisnopser ron ytilibail for srorre
ro yna secneuqesnoc gnisira from eht esu of eht
noitamrofni deniatnoc .niereh laniF noitanimreted of eht
ytilibatius of yna ,noitamrofni ,erudecorp ro tcudorp for
esu detalpmetnoc yb yna ,resu dna eht rennam of taht
,esu si eht elos ytilibisnopser of eht .resu
ehT koob si dednetni for lanoitamrofni sesoprup .ylno ehT
redaer si denraw taht noituac tsum syawla eb desicrexe
nehw gnilaed htiw ,slacimehc ,stcudorp ro serudecorp
hcihw thgim eb deredisnoc .suodrazah trepxE ecivda
dluohs eb deniatbo ta lla semit nehw noitatnemelpmi si
gnieb .deredisnoc
noitneM of edart seman ro laicremmoc stcudorp seod ton
etutitsnoc tnemesrodne ro noitadnemmocer for esu yb eht
.rehsilbuP
Preface
ehT citehtnys sdnomaid depoleved yb lairtsudni snoitazinagro ni eht
s’0591 dna s’0691 gnisu a noitanibmoc of ,erusserp-hgih -hgih
erutarepmet )THPH( seuqinhcet era desu yliramirp ni ,gnittuc gnidnirg dna
gnihsilop .snoitacilppa ,revewoH a yteirav of laitnetop snoitacilppa for siht
lairetam eriuqer niht smlif dna sgnitaoc hcihw tonnac eb decudorp yb
eseht .sdohtem ehT stluser of hcum rellams ,stroffe suoenatlumis htiw eht
HPHT ,seiduts ni eht detinU setatS dna aissuR dna denrecnoc htob htiw
eht scitenik of eht sisyloryp of suoirav negordyh-nobracordyh serutxim
dna htiw eht smsinahcem of noitaelcun dna htworg of dnomaid no
dnomaid sdees ta wol serusserp erew deredisnoc ot eb ylno of ”cimedaca“
.tseretni ,revewoH eht noitacilbup of shpargorcim of ylhgih detecaf dna
suounitnoc dnomaid ,smlif dna gnimrifnoc lacitylana ,atad ni eht naissuR
,dna ,yltneuqesbus ni eht esenapaJ cifitneics erutaretil ni eht etal s’0791
dna ylrae s’0891 dezylatac laitnatsbus ytivitca ni siht .dleif sihT detluser
ni eht tnempoleved dna esu of a yteirav of noitisoped dna noitaziretcarahc
seuqinhcet ot eveihca dna yduts dnomaid smlif dna .sgnitaoc
ehT esoprup of siht koob si ot edivorp na htped-ni noitanimaxe of
detceles scipot denrecnoc htiw citehtnys .dnomaid sihT euqinu lairetam
sah neeb deredisnoc from eht sevitcepsrep of lacirotsih ,tnempoleved sti
,seitreporp eht tsetal ni cifitneics stluser gnidrager sti htworg dna
noitaziretcarahc dna tneserp dna erutuf .snoitacilppa
ehT thgie sretpahc of siht koob era derohtua yb strepxe ni rieht .sdleif ehT
laitini retpahc yb redoY sedivorp na detaler-snoitacilppa enotsrenroc for
eht .koob selbaT of lla eht major seitreporp of dnomaid era nevig ni
noitcnujnoc htiw snoissucsid denrecnoc htiw eht ecnatropmi of eseht
vii
viii Preface
seitreporp ot eht tneserp dna laitnetop tnemyolpme of siht .lairetam gnivaH
denimreted eht deen for citehtnys ,dnomaid eht tneuqesbus retpahc yb
uassaN sebircsed eht elbaredisnoc stroffe ot poleved siht lairetam htiw na
sisahpme no eht ,erutarepmet-hgih erusserp-hgih .hcraeser ehT
redniamer of eht koob si denrecnoc htiw dnomaid slairetam nworg
yliramirp from eht ropav .esahp ,nossrheP iileC dna reltuB sserdda eht
tnatropmi eussi of eht lacimehc smsinahcem gnirrucco nihtiw eht sag
esahp hcihw yletamitlu wolla eht noitisoped of siht lairetam rednu -non
muirbiliuqe snoitidnoc no suoirav .setartsbus ehT suoirav sdohtem dna
latnemirepxe snoitidnoc nihtiw hcihw eno nac niatbo eht reporp esahp-sag
yrtsimehc dna gnitluser dnomaid smlif si debircsed yb .aboK xuL dna
renbuaH ebircsed eht tekram laitnetop dna tnerruc snoitacilppa of dnomaid
ni smret of raew tnatsiser sgnitaoc for a yteirav of .stcudorp ehT ,lacimehc
lacisyhp dna larutcurtsorcim noitaziretcarahc of eht wol erusserp dnomaid
slairetam saw desu yllaitini ot ecnivnoc eht scitpeks of sti .ecnetsixe
yltneuqesbuS ti saw desu ot enimreted eht erutan of eht detisoped
lairetam dna ot edivorp noitamrofni for eht noitazimitpo of eht ralucitrap
htworg .dohtem ehT retpahc yb ,uhZ gnoK dna ssalG sedivorp na -ni
htped weiver of eht sdohtem dna stluser of siht tnacifingis effort.
snoitacilppA of dnomaid smlif dna sgnitaoc era won gnieb .dezilaer nI eht
lanif owt ,sretpahc ,onalP oenniP dna saD evah nekat eht noitamrofni
tnetnoc ni eht koob lluf elcric htiw rieht noissucsid gnidrager htob eht
noitacifitnedi of eht tnaveler seitreporp hcihw affect eht tnempoleved of
cinortcelenon dna cinortcele snoitacilppa for dnomaid smlif dna eht erutuf
hcraeser yrassecen for ytreporp .tnemecnahne evisnetxE stsil of ,sweiver
hcraeser srepap dna seihpargoilbib ta eht dne of hcae retpahc osla
edivorp ecruoser slairetam for erom deliated .yduts
suoremuN slaudividni evah detubirtnoc dna detsissa ni eht noitaraperp of
siht .koob I hsiw ot sserpxe ym noitaicerppa yltsrif ot eht srohtua dna rieht
sreyolpme ohw detubirtnoc elbaredisnoc effort, emit dna seitilicaf for eht
noitareneg of hcae .retpahc I am osla yllaicepse detbedni ot Jeff ssalG
ohw dedivorp suoremun ,snoitseggus ecnatsissa dna rohtua .tcatnoc I osla
etaicerppa eht ecneitap dna launitnoc tnemegaruocne of egroeG ,atiraN
evitucexE rotidE of seyoN ,snoitacilbuP gnirud eht noitelpmoc of lla eht
sksat devlovni ni eht gnitide of siht .koob tsaL tub ton ,tsael I hsiw ot
dnetxe ym laiceps sknaht ot ym ,efiw ,naJ dna ,rethguad ,anoeL for rieht
ecneitap dna for eht emit I dluoc ton dneps htiw meht gnirud siht
.rovaedne
,hgielaR htroN aniloraC treboR .F sivaD
,rebmetpeS 2991
Contents
1. DIAMOND PROPERTIES AND APPLICATIONS ............. 1
Max N. Yoder
1.0 The Crystalline Structure of Diamond ............ 1
1.1 enillatsyrC nobraC ........................ 2
0.2 Mechanical and Elastic Properties of Diamond ..... 3
2.1 taeH ............................... 4...
2.2 citsalE sevaW ........................... 7
3.2 ssendraH .............................. 7
4.2 s’gnuoY suludoM ......................... 8
5.2 erutcarF ssenhguoT ....................... 8
6.2 tneiciffeoC of noitcirF ...................... 9
7.2 ytisneD ............................... 01
0.3 Optical Properties of Diamond ................ 11
4.0 Electrical Properties of Diamond ............... 11
5.0 High Temperature and Tribological Applications
of Diamond ............................... 14
5.1 Graphitization .......................... 14
5.2 Corrosion and Oxidation ................... 41
3.5 taeH sregnahcxE ........................ 51
4.5 ygolobirT dna ssendraH ................... 61
0.6 Optical Applications of Diamond .............. 19
6.1 Windows .............................. 91
6.2 Optical Matching ........................ 21
6.3 Fresnel sneL ........................... 22
4.6 yaR-X snoitacilppA ...................... 42
0.7 Electra-Optic and Related Applications ......... 25
7.1 Optically Triggered Switches ................ 25
xi
xii Contents
7.2 sresaL ............................... 26
8.0 Biological Applications ...................... 26
8.1 Artificial Heart Valves ..................... 26
8.2 Scalpels .............................. 27
8.3 Marine Fouling .......................... 27
References.. ................................. 28
2. SYNTHESIS OF BULK DIAMOND: HISTORY AND
PRESENT STATUS ................................ 31
Kurt Nassau
1.0 Introduction .............................. 31
2.0 The Early History of Diamond Synthesis ......... 32
2.1 HistoricalA spects ....................... 32
2.2 Early Diamond Claims .................... 33
2.3 The Diamond Problem .................... 34
2.4 P.W. Bridgman and High Pressure Research .... 36
3.0 The High Pressure Growth of Diamond .......... 40
3.1 The General Electric Diamond Project ......... 40
3.2 H.T. Hall, the First Person to Grow Diamond .... 46
3.3 The High Pressure Synthesis of Diamond Cut ... 49
3.4 High Pressure Single Crystal Growth of
Diamond .............................. 53
3.5 Color in Synthetic Diamond ................. 55
4.0 Other Bulk Diamond Synthesis Processes ....... 57
4.1 High Pressure Carbonado .................. 57
4.2 The Shock Wave Process .................. 58
5.0 The Present Status of High Pressure
Diamond Growth ............................ 61
References.. ................................. 64
3. CHEMICAL MECHANISMS OF DIAMOND CVD ............ 68
Pehr E. Pehrsson, Frances G. Celii, and James E. Butler
1. O Introduction .............................. 68
2.0 Nucleation ............................... 71
2.1 The Two-Step Nucleation Process ........... 76
2.2 Epitaxial Diamond Growth ................. 001
2.3 Nucleation: A Summary .................. 106
3.0 Growth ................................. 108
3.1 ehT dnomaiD htworG ecafruS .............. 901
3.2 noitaziretcarahC of eht suoesaG htworG
tnemnorivnE .......................... 111
3.3 sledoM of eht suoesaG htworG tnemnorivnE ... 911
3.4 sledoM of dnomaiD htworG ................ 521
References .................................. 133